Get current pricing for Eni, GHW50A-12DF3H0-M1 Rf Plasma Generator. Rf Output Of Up To 5000w At A Frequency Of 12.56 Mhz. Eni Rev 2, Software Version 3.7. 200/208v, 3 Ph, 50/60 Hz, 38a. . Product Category: Semiconductor, Sub Category::