Get current pricing for Varian, HS-16 Large Diffusion Pump. 16 In. Asa Flange. Pumping Speed: 10,000 L/s. Operating Range: 1 X 10^-3 To 5 X 10^-8 Torr. 480v, 3 Ph, 50/60 Hz. . Product Category: Lab Equipment, Sub Category: Vacuum Pumps: