Get current pricing for Kla-tencor, KLA-Tencor AIT UV fo Kla-tencor Ait Uv Darkfield Defect Inspection System Consisting Of: - Model: Ait-uv Mainframe- Darkfield Defect Inspection System- Cursetup: 8/2 . Product Category: Semiconductor, Sub Category: Metrology And Inspection: