Get current pricing for Kla-tencor, KLA-Tencor CRS-2000 Kla-tencor Crs-2000 Optical Defect Review System Consisting Of: - Model: Crs-2000- Optical Defect Review System- Wafer Size: 200mm- Year Of Manufactu . Product Category: Semiconductor, Sub Category: Metrology And Inspection: