Get current pricing for Plasmatherm, 700 VLR (Versalock ) Versalock Pecvd System With (1) Lm/tm Module (2) Pecvd Module - 5 Mks Mass Flow Controllers (n2,he, Cf4, Silane, Spare) Rfpp-rf5s Rf Power Supply, Ley . Product Category: Semiconductor, Sub Category: Deposition Equipment: