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Manufacturer: Plasmatherm Part number: 7300 PECVD Description: Pc Operated 7000 Pecvd System 32 Upper Electrode (5) Mfcs - Mks 1479a - N2 Purge,nf3- 2000sccm,n2-1000sccm,he-5000sccm,nh3-50sccm,sih4-2000sccm, . Product Category: Semiconductor, Sub Category: Etchers/ashers

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Manufacturer: Plasmatherm Part number: 7300 PECVD Description: Pc Operated 7000 Pecvd System 32 Upper Electrode (5) Mfcs - Mks 1479a - N2 Purge,nf3- 2000sccm,n2-1000sccm,he-5000sccm,nh3-50sccm,sih4-2000sccm, . Product Category: Semiconductor, Sub Category: Etchers/ashers