Get current pricing for Tegal, Tegal-48335-ID Recipe Storage: 20 Recipes (standard) Modularized For Ease Of Service Gas Input: Mass Flow Controllers (4) Flow Ranges: 1. 0-15 Sccm (n2 Calibra . Product Category: Semiconductor, Sub Category: Etchers/ashers:

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Manufacturer: Tegal Part number: Tegal-48335-ID Description: Recipe Storage: 20 Recipes (standard) Modularized For Ease Of Service Gas Input: Mass Flow Controllers (4) Flow Ranges: 1. 0-15 Sccm (n2 Calibra . Product Category: Semiconductor, Sub Category: Etchers/ashers

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Manufacturer: Tegal Part number: Tegal-48335-ID Description: Recipe Storage: 20 Recipes (standard) Modularized For Ease Of Service Gas Input: Mass Flow Controllers (4) Flow Ranges: 1. 0-15 Sccm (n2 Calibra . Product Category: Semiconductor, Sub Category: Etchers/ashers