Get current pricing for New Sp 3510pc, NEW SP 3510PC-48306-ID Gas Flows: O2 = 1000 - 4000 Sccm, N2/h2 = 100 - 1000 Sccm, N2 = 100 - 500 Sccm Pressure: 0.5 - >5.0 Torr Platen Temperature: 100 - 300°c &mi . Product Category: Semiconductor, Sub Category: Etchers/ashers:

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Manufacturer: New Sp 3510pc Part number: NEW SP 3510PC-48306-ID Description: Gas Flows: O2 = 1000 - 4000 Sccm, N2/h2 = 100 - 1000 Sccm, N2 = 100 - 500 Sccm Pressure: 0.5 - >5.0 Torr Platen Temperature: 100 - 300°c &mi . Product Category: Semiconductor, Sub Category: Etchers/ashers

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Manufacturer: New Sp 3510pc Part number: NEW SP 3510PC-48306-ID Description: Gas Flows: O2 = 1000 - 4000 Sccm, N2/h2 = 100 - 1000 Sccm, N2 = 100 - 500 Sccm Pressure: 0.5 - >5.0 Torr Platen Temperature: 100 - 300°c &mi . Product Category: Semiconductor, Sub Category: Etchers/ashers