Get current pricing for Kla-tencor Ait I (8020), KLA-Tencor AIT I (8020)-48278-ID Can Detect Particles As Small As 0.10 Micrometers On Bare Silicon And Patterned Process Wafers. High Throughput Of Up To 30 Full Wafer Scans Per Hour . Product Category: Semiconductor, Sub Category: Metrology And Inspection: