Get current pricing for Kla-tencor 6200 Surfscan, KLA-Tencor 6200 Surfscan-48275-ID Laser Type Wavelength: Arion 488 30mw Particle Sensitivity: 0.10µm @ 95% Measurement Range: 0.09 - 9999µm Haze Sensitivity Resolution: . Product Category: Semiconductor, Sub Category: Metrology And Inspection: