Get current pricing for Kla-tencor 6220 Surfscan, KLA-Tencor 6220 Surfscan-48276-ID Throughput: 150 Per Hour For 200mm Wafers Accommodates Wafer Sizes: 100,125,150,200mm Sensitivity: 0.09µm @ 80% Capture Rate Repeatability Is . Product Category: Semiconductor, Sub Category: Metrology And Inspection: