Get current pricing for Kla-tencor Surfscan 5500, KLA-Tencor Surfscan 5500-48291-ID Can Handle From 2 To 8 Wafers Submicron Sensitivity, Detects 0.2 Micron Particles Surface Haze Detected As Low As 0.3 Ppm . Product Category: Semiconductor, Sub Category: Metrology And Inspection: