Get current pricing for Kla-tencor Surfscan 7600, KLA-Tencor Surfscan 7600-48294-ID Particle Sensitivity: 0.15um Diameter Latex Spheres On Bare Silicon And Patterned Process Wafers. Substrate Speed: 2.6mm/s Forward Motion Speed While . Product Category: Semiconductor, Sub Category: Metrology And Inspection: