Get current pricing for Rudolph Research Fe-iiid, Rudolph Research FE-IIID-48325-ID Spot Size: 12x24 Um Test Site: De-skew Only 125 Um, Site By Site 50 Um Wafer Handling: 3-axis Robot With Random Access To Three Cassettes For 100 Mm, . Product Category: Semiconductor, Sub Category: Metrology And Inspection: