Get current pricing for Veeco Dektak 3st Surface, Veeco Dektak 3ST Surface-48340-ID Step Height Measurement Range - Maximum: 100 Å Minimum: 1310 KÅ, Stylus Radius: 2.50 Micron Wafer Size Maximum: 150 Mm Scan Leng . Product Category: Semiconductor, Sub Category: Metrology And Inspection: