Get current pricing for Canon Mpa 600fa Mirror Pr, Canon MPA 600FA Mirror Pr-48227-ID Illumination: 2kw High Pressure Mercury Lamp Intensity: > 600mw / Cm2 (6 Inch Wafer) Illumination Uniformity: ± 3% Resolution: 1.5µ . Product Category: Semiconductor, Sub Category: Photolithography: