Get current pricing for Gasonics Ae2001 Etch Syst, GaSonics AE2001 Etch Syst-48248-ID Configurable For 75mm,100mm,125mm, And150mm Wafer Sizes. Gases: Nf3, Cf4, He, O2, Purge, N2 (vcr Fittings), Etch Rates And Throughputs: . Product Category: Semiconductor, Sub Category: Etchers/ashers: