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Manufacturer: Gasonics Aura 3010 Photor Part number: GaSonics Aura 3010 Photor-48251-ID Description: Pressure: 0.5 - >5.0 Torr Microwave Power: 0 - 1400 Watt At 2.45 Ghz Wafer Temperature: 90-300 C° Throughput:, Bulk Resist Removal - 4 . Product Category: Semiconductor, Sub Category: Etchers/ashers

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