Get current pricing for Kla-tencor Flexus Flx-550, KLA-Tencor Flexus FLX-550-48283-ID Capable Of Sizes 150mm To 200mm Smif, System Temperature Range: Ambient, Throughput: Greater Than 54 200-mm Wafer Per Hour Measurement S . Product Category: Semiconductor, Sub Category: Metrology And Inspection: