Get current pricing for Kla-tencor P-10 Surface P, KLA-Tencor P-10 Surface P-48286-ID Sample Size: Up To 200mm Low Force Head: 0.05 - 15mg 0.05mg Resolution Step Heigh Repeatability, 0.001µm Max. In The 13µm Range, 0.005& . Product Category: Semiconductor, Sub Category: Metrology And Inspection: