Get current pricing for Kla-tencor Sp1-tbi Unpatt, KLA-Tencor SP1-TBI Unpatt-48290-ID Dual Dark Field Collection Channels. Sensitivity 60nm / 0.060µm. 0.001 Ppm Haze Sensitivity. Argon Ion Laser (488nm. Illumination Normal And . Product Category: Semiconductor, Sub Category: Metrology And Inspection: