Get current pricing for March Px-1000 Batch Rie A, March PX-1000 Batch RIE A-48304-ID Chamber Interior Dimensions (inches): 16.25w X 17h X 20d Exterior Dimensions: 33w X 24.5h X 36d 1000 Watt Output Power Requirements: 220v, 50/60 . Product Category: Semiconductor, Sub Category: Etchers/ashers: