Get current pricing for Steag Ast Shs2000 - Rapid, Steag AST SHS2000 - Rapid-48333-ID Wafer Size: 75 To 200mm Process Gases - Standard: Nh3, N20, Ar, O2 Recommended Temp. Range: 400 Deg. C To 1200 Deg. C Absolute Temperature Accuracy . Product Category: Semiconductor, Sub Category: Rapid Thermal Process: