Part # |
Manufacturer |
Description |
Condition |
Units Available |
Price |
Plasmatherm |
Plasmatherm
|
Plasmatherm 790 Pecvd Non-load Lock System Heated Lower Electrode Water Cooled/heated Chamber Advanced Energy Rf5s 500w 13.56mhz Power Supply With Mat . Product Category: Semiconductor, Sub Category: Rapid Thermal Process |
Refurbished |
1 |
|
Plasmatherm-7983-ID |
Plasmatherm
|
Plasmatherm/unaxis Vlr Icp Cassette To Cassette System, (1) Lm/tm Module Single Load Lock With Single Endeffector, (1) Icp Bosch Module, Currently Set . Product Category: Semiconductor, Sub Category: Rapid Thermal Process |
Refurbished |
1 |
|
Plasmatherm 790 PECV |
Plasmatherm
|
Plasmatherm 790 Pecvd System Consisting Of: - Model: 790 - Pecvd Chamber- Capable Of Processing Up To 6/150mm Wafers - Currently Set For: 4/100mm ( . Product Category: Semiconductor, Sub Category: Etchers/ashers |
Refurbished |
1 |
|
Plasmatherm SLR-730 |
Plasmatherm
|
Plasmatherm Unaxis Slr-730 Pecvd System Consisting Of: - Model: Slr-730 Pecvd - Dual Chamber System- Load Locked - Max Wafer Size: 8/200mm- Edward . Product Category: Semiconductor, Sub Category: Etchers/ashers |
Refurbished |
1 |
|
700 VLR (Versalock ) |
Plasmatherm
|
Versalock Pecvd System With (1) Lm/tm Module (2) Pecvd Module - 5 Mks Mass Flow Controllers (n2,he, Cf4, Silane, Spare) Rfpp-rf5s Rf Power Supply, Ley . Product Category: Semiconductor, Sub Category: Deposition Equipment |
Refurbished |
1 |
|
7300 PECVD |
Plasmatherm
|
Pc Operated 7000 Pecvd System 32 Upper Electrode (5) Mfcs - Mks 1479a - N2 Purge,nf3- 2000sccm,n2-1000sccm,he-5000sccm,nh3-50sccm,sih4-2000sccm, . Product Category: Semiconductor, Sub Category: Etchers/ashers |
Refurbished |
1 |
|
790 PECVD |
Plasmatherm
|
Stand Alone 790 Pecvd Deposition System Pc Controlled, 8 Electrode, Advanced Energy Rfpp - Rf5s Power Supply With Am5 Matching Network, Gas Pane . Product Category: Semiconductor, Sub Category: Deposition Equipment |
Refurbished |
1 |
|
790 RIE |
Plasmatherm
|
Stand Alone 790 Rie - Reactive Ion Etch System, Window Based Pc Controlled With Flat Panel Display, 11 Lower Electrode, Advanced Energy Rfpp - R . Product Category: Semiconductor, Sub Category: Deposition Equipment |
Refurbished |
1 |
|
Batchtop VII |
Plasmatherm
|
6 Table Top Rie Model Number 6 Rie Mf Rfpp - Rf5s 500 Watt @ 13.56 Mhz Power Supply & Am5 6 Chuck W/ Showerhead (3) Mfcs - Mks Type . Product Category: Semiconductor, Sub Category: Etchers/ashers |
Refurbished |
1 |
|
Dual chamber 730/720 |
Plasmatherm
|
Dual Chamber Reactive Ion Etcher/pecvd Plasma Shuttle-lock Load-lock Loading System With Platen Transfer Model 700 Al Chamber With 11 Rie Substrate El . Product Category: Semiconductor, Sub Category: Etchers/ashers |
Refurbished |
1 |
|
Dual Chamber 770 ICP |
Plasmatherm
|
Shuttlelock Dual Chamber 770 Icp (ion Coupled Plasmaer)etcher, Load Lock Shuttle Lock Transfer, Rfpprf5s Rf Power Supply W/am5, Six Zone Heater,pm5 Pr . Product Category: Semiconductor, Sub Category: Etchers/ashers |
Refurbished |
1 |
|
Dual Chamber PVD-RIE |
Plasmatherm
|
Plasmatherm Dual Chamber Reactive Ion Etch (rie)and Physcial Vapor Deposition System,dual 700 Style Alumimum Chambers With Load Lock,11 Inch Lower Ele . Product Category: Semiconductor, Sub Category: Deposition Equipment |
Refurbished |
1 |
|
PT530 PECVD |
Plasmatherm
|
Plasmatherm Pecvd Deposition System Rf Plasma Product Model Hfs-801s Rf Power Supply (800w-13.56mhz) With Rf Plasma Products Model Amn-501 500w-13.56, . Product Category: Semiconductor, Sub Category: Deposition Equipment |
Refurbished |
1 |
|
SLR 720 RIE |
Plasmatherm
|
Reactive Ion Etcher Plasma Shuttle-lock Load-lock Loading System With Platen Transfer Model 700 Al Chamber With 11 Pc - Window Based System. Advanced . Product Category: Semiconductor, Sub Category: Etchers/ashers |
Refurbished |
1 |
|
SLR 730 PECVD |
Plasmatherm
|
Plasma Shuttle-lock Load-lock Loading System With Platen Transfer Model 700 Al Chamber For Pecvd Deposition, 2-8 Platten,13inch Top Electrode,wa . Product Category: Semiconductor, Sub Category: Deposition Equipment |
Refurbished |
1 |
|
|
|